# A novel material detection method using femtosecond laser, confocal imaging and image processing enabling endpointing in fast inspection of microelectronics

> Research article (Microelectronics Reliability, 2021) · cited 13× · AI/ML

**Wikidata**: [openalex:W3207491115](https://www.wikidata.org/wiki/openalex:W3207491115)  
**Source**: https://4ort.xyz/entity/a-novel-material-detection-method-using-femtosecond-laser-confocal-imaging-and-image-processing-enabling-endpointing-in-