# A novel hypergraph convolution network-based approach for predicting the material removal rate in chemical mechanical planarization

> Research article (Journal of Intelligent Manufacturing, 2021) · cited 52× · AI/ML

**Wikidata**: [openalex:W3165159705](https://www.wikidata.org/wiki/openalex:W3165159705)  
**Source**: https://4ort.xyz/entity/a-novel-hypergraph-convolution-network-based-approach-for-predicting-the-material-removal-rate-in-chemical-mechanical-pl