# A novel approach for wafer defect pattern classification based on topological data analysis

> Research article (Expert Systems with Applications, 2023) · cited 16× · AI/ML

**Wikidata**: [openalex:W4380261241](https://www.wikidata.org/wiki/openalex:W4380261241)  
**Source**: https://4ort.xyz/entity/a-novel-approach-for-wafer-defect-pattern-classification-based-on-topological-data-analysis