# A new precise positioning method for piezoelectric scanner of AFM

> Research article (Ultramicroscopy, 2018) · cited 20× · AI/ML

**Wikidata**: [openalex:W2890103457](https://www.wikidata.org/wiki/openalex:W2890103457)  
**Source**: https://4ort.xyz/entity/a-new-precise-positioning-method-for-piezoelectric-scanner-of-afm