# A new lithography hotspot detection framework based on AdaBoost classifier and simplified feature extraction

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2015) · cited 90× · AI/ML

**Wikidata**: [openalex:W2092970276](https://www.wikidata.org/wiki/openalex:W2092970276)  
**Source**: https://4ort.xyz/entity/a-new-lithography-hotspot-detection-framework-based-on-adaboost-classifier-and-simplified-feature-extraction