# A New Hybrid Micromachined Contactless Suspension With Linear and Angular Positioning and Adjustable Dynamics

> Research article (Journal of Microelectromechanical Systems, 2015) · cited 31× · AI/ML

**Wikidata**: [openalex:W1650203809](https://www.wikidata.org/wiki/openalex:W1650203809)  
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