# A new design and a fabrication approach to realize a high performance three axes capacitive MEMS accelerometer

> Research article (Sensors and Actuators A Physical, 2016) · cited 76× · AI/ML

**Wikidata**: [openalex:W2323516091](https://www.wikidata.org/wiki/openalex:W2323516091)  
**Source**: https://4ort.xyz/entity/a-new-design-and-a-fabrication-approach-to-realize-a-high-performance-three-axes-capacitive-mems-accelerometer