# A Neural Network-Based Approach to Material Removal Rate Prediction for Copper Chemical Mechanical Planarization

> Research article (ECS Journal of Solid State Science and Technology, 2021) · cited 10× · AI/ML

**Wikidata**: [openalex:W3157092938](https://www.wikidata.org/wiki/openalex:W3157092938)  
**Source**: https://4ort.xyz/entity/a-neural-network-based-approach-to-material-removal-rate-prediction-for-copper-chemical-mechanical-planarization