# A Multiscale Attention Mechanism Super-Resolution Confocal Microscopy for Wafer Defect Detection

> Research article (IEEE Transactions on Automation Science and Engineering, 2024) · cited 16× · AI/ML

**Wikidata**: [openalex:W4391454560](https://www.wikidata.org/wiki/openalex:W4391454560)  
**Source**: https://4ort.xyz/entity/a-multiscale-attention-mechanism-super-resolution-confocal-microscopy-for-wafer-defect-detection