# A monolithic MEMS position sensor for closed-loop high-speed atomic force microscopy

> Research article (Nanotechnology, 2016) · cited 28× · AI/ML

**Wikidata**: [openalex:W2283072998](https://www.wikidata.org/wiki/openalex:W2283072998)  
**Source**: https://4ort.xyz/entity/a-monolithic-mems-position-sensor-for-closed-loop-high-speed-atomic-force-microscopy