# A mode-localized MEMS electrical potential sensor based on three electrically coupled resonators

> Research article (Journal of sensors and sensor systems, 2017) · cited 19× · AI/ML

**Wikidata**: [openalex:W2570632537](https://www.wikidata.org/wiki/openalex:W2570632537)  
**Source**: https://4ort.xyz/entity/a-mode-localized-mems-electrical-potential-sensor-based-on-three-electrically-coupled-resonators