# A “micro-macro” integrated planar MEMS tactile sensor for precise modeling and measurement of fingertip sensation

> Research article (2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), 2017) · cited 13× · AI/ML

**Wikidata**: [openalex:W2592493730](https://www.wikidata.org/wiki/openalex:W2592493730)  
**Source**: https://4ort.xyz/entity/a-micro-macro-integrated-planar-mems-tactile-sensor-for-precise-modeling-and-measurement-of-fingertip-sensation