# A Method for Wafer Defect Detection Using Spatial Feature Points Guided Affine Iterative Closest Point Algorithm

> Research article (IEEE Access, 2020) · cited 25× · AI/ML

**Wikidata**: [openalex:W3023116395](https://www.wikidata.org/wiki/openalex:W3023116395)  
**Source**: https://4ort.xyz/entity/a-method-for-wafer-defect-detection-using-spatial-feature-points-guided-affine-iterative-closest-point-algorithm