# A MEMS Resonant Accelerometer With High Relative Sensitivity Based on Sensing Scheme of Electrostatically Induced Stiffness Perturbation

> Research article (Journal of Microelectromechanical Systems, 2020) · cited 29× · AI/ML

**Wikidata**: [openalex:W3108710722](https://www.wikidata.org/wiki/openalex:W3108710722)  
**Source**: https://4ort.xyz/entity/a-mems-resonant-accelerometer-with-high-relative-sensitivity-based-on-sensing-scheme-of-electrostatically-induced-stiffn
