# A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process

> Research article (Micromachines, 2019) · cited 42× · AI/ML

**Wikidata**: [openalex:W2948851209](https://www.wikidata.org/wiki/openalex:W2948851209)  
**Source**: https://4ort.xyz/entity/a-mems-micro-g-capacitive-accelerometer-based-on-through-silicon-wafer-etching-process