# A MEMS<i>XY</i>-stage integrating compliant mechanism for nanopositioning at sub-nanometer resolution

> Research article (Journal of Micromechanics and Microengineering, 2016) · cited 29× · AI/ML

**Wikidata**: [openalex:W2548795042](https://www.wikidata.org/wiki/openalex:W2548795042)  
**Source**: https://4ort.xyz/entity/a-mems-i-xy-i-stage-integrating-compliant-mechanism-for-nanopositioning-at-sub-nanometer-resolution