# A MEMS-Assisted Temperature Sensor With 20- $\mu \text{K}$ Resolution, Conversion Rate of 200 S/s, and FOM of 0.04 pJK2

> Research article (IEEE Journal of Solid-State Circuits, 2016) · cited 66× · AI/ML

**Wikidata**: [openalex:W2555980335](https://www.wikidata.org/wiki/openalex:W2555980335)  
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