# A Low-Noise High-Order Mode-Localized MEMS Accelerometer

> Research article (Journal of Microelectromechanical Systems, 2021) · cited 29× · AI/ML

**Wikidata**: [openalex:W3132063082](https://www.wikidata.org/wiki/openalex:W3132063082)  
**Source**: https://4ort.xyz/entity/a-low-noise-high-order-mode-localized-mems-accelerometer