# A low noise capacitive MEMS accelerometer with anti-spring structure

> Research article (Sensors and Actuators A Physical, 2019) · cited 85× · AI/ML

**Wikidata**: [openalex:W2955495303](https://www.wikidata.org/wiki/openalex:W2955495303)  
**Source**: https://4ort.xyz/entity/a-low-noise-capacitive-mems-accelerometer-with-anti-spring-structure