# A Large Aperture 2-Axis Electrothermal MEMS Mirror for Compact 3D LiDAR

> Research article (2019 International Conference on Optical MEMS and Nanophotonics (OMN), 2019) · cited 11× · AI/ML

**Wikidata**: [openalex:W2994763134](https://www.wikidata.org/wiki/openalex:W2994763134)  
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