# A High‐Resolution Versatile Focused Ion Implantation Platform for Nanoscale Engineering

> Research article (Advanced Engineering Materials, 2023) · cited 15× · AI/ML

**Wikidata**: [openalex:W4386753617](https://www.wikidata.org/wiki/openalex:W4386753617)  
**Source**: https://4ort.xyz/entity/a-highresolution-versatile-focused-ion-implantation-platform-for-nanoscale-engineering