# A Highly Integrated 3D MEMS Force Sensing Module With Variable Sensitivity for Robotic‐Assisted Minimally Invasive Surgery

> Research article (Advanced Functional Materials, 2023) · cited 40× · AI/ML

**Wikidata**: [openalex:W4382699333](https://www.wikidata.org/wiki/openalex:W4382699333)  
**Source**: https://4ort.xyz/entity/a-highly-integrated-3d-mems-force-sensing-module-with-variable-sensitivity-for-roboticassisted-minimally-invasive-surger