# A high-speed exposure method for digital micromirror device based scanning maskless lithography system

> Research article (Optik, 2019) · cited 11× · AI/ML

**Wikidata**: [openalex:W2930791496](https://www.wikidata.org/wiki/openalex:W2930791496)  
**Source**: https://4ort.xyz/entity/a-high-speed-exposure-method-for-digital-micromirror-device-based-scanning-maskless-lithography-system