# A high-speed atomic force microscopy with super resolution based on path planning scanning

> Research article (Ultramicroscopy, 2020) · cited 25× · AI/ML

**Wikidata**: [openalex:W3015985621](https://www.wikidata.org/wiki/openalex:W3015985621)  
**Source**: https://4ort.xyz/entity/a-high-speed-atomic-force-microscopy-with-super-resolution-based-on-path-planning-scanning