# A High-Precision and High-Bandwidth MEMS-Based Capacitive Accelerometer

> Research article (IEEE Sensors Journal, 2018) · cited 74× · AI/ML

**Wikidata**: [openalex:W2809328549](https://www.wikidata.org/wiki/openalex:W2809328549)  
**Source**: https://4ort.xyz/entity/a-high-precision-and-high-bandwidth-mems-based-capacitive-accelerometer