# A High-Performance MEMS Accelerometer with an Improved TGV Process of Low Cost

> Research article (Micromachines, 2022) · cited 13× · AI/ML

**Wikidata**: [openalex:W4283825260](https://www.wikidata.org/wiki/openalex:W4283825260)  
**Source**: https://4ort.xyz/entity/a-high-performance-mems-accelerometer-with-an-improved-tgv-process-of-low-cost