# A High Dynamic Range Closed-Loop Stiffness-Adjustable MEMS Force Sensor

> Research article (Journal of Microelectromechanical Systems, 2020) · cited 21× · AI/ML

**Wikidata**: [openalex:W3016070936](https://www.wikidata.org/wiki/openalex:W3016070936)  
**Source**: https://4ort.xyz/entity/a-high-dynamic-range-closed-loop-stiffness-adjustable-mems-force-sensor