# A Generic CMOS Compatible Piezoelectric Multilayer Actuator Approach Based on Permanent Ferroelectric Polarization Inversion In Al<sub>1-X</sub> Sc<sub>x</sub>N

> Research article (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems &amp; Eurosensors XXXIII (TRANSDUCERS &amp; EUROSENSORS XXXIII), 2019) · cited 10× · AI/ML

**Wikidata**: [openalex:W2969871719](https://www.wikidata.org/wiki/openalex:W2969871719)  
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