# A generative-adversarial-network-based temporal raw trace data augmentation framework for fault detection in semiconductor manufacturing

> Research article (Engineering Applications of Artificial Intelligence, 2024) · cited 11× · AI/ML

**Wikidata**: [openalex:W4404328104](https://www.wikidata.org/wiki/openalex:W4404328104)  
**Source**: https://4ort.xyz/entity/a-generative-adversarial-network-based-temporal-raw-trace-data-augmentation-framework-for-fault-detection-in-semiconduct