# A full-flow inspection method based on machine vision to detect wafer surface defects

> Research article (Mathematical Biosciences & Engineering, 2023) · cited 16× · AI/ML

**Wikidata**: [openalex:W4381460233](https://www.wikidata.org/wiki/openalex:W4381460233)  
**Source**: https://4ort.xyz/entity/a-full-flow-inspection-method-based-on-machine-vision-to-detect-wafer-surface-defects