# A Fine-Grained, End-to-End Feature-Scale CMP Modeling Paradigm Based on Fully Convolutional Neural Networks

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2023) · cited 13× · AI/ML

**Wikidata**: [openalex:W4362514662](https://www.wikidata.org/wiki/openalex:W4362514662)  
**Source**: https://4ort.xyz/entity/a-fine-grained-end-to-end-feature-scale-cmp-modeling-paradigm-based-on-fully-convolutional-neural-networks