# A dual-axis MEMS capacitive inertial sensor with high-density proof mass

> Research article (Microsystem Technologies, 2015) · cited 19× · AI/ML

**Wikidata**: [openalex:W2072547210](https://www.wikidata.org/wiki/openalex:W2072547210)  
**Source**: https://4ort.xyz/entity/a-dual-axis-mems-capacitive-inertial-sensor-with-high-density-proof-mass