# A Distributed Supervisor Architecture for a General Wafer Production System

> Research article (Sensors, 2023) · cited 20× · AI/ML

**Wikidata**: [openalex:W4376630056](https://www.wikidata.org/wiki/openalex:W4376630056)  
**Source**: https://4ort.xyz/entity/a-distributed-supervisor-architecture-for-a-general-wafer-production-system