# A Digital Twin Framework With Bayesian Optimization and Deep Learning for Semiconductor Process Control

> Research article (IEEE Access, 2025) · cited 10× · AI/ML

**Wikidata**: [openalex:W4408441342](https://www.wikidata.org/wiki/openalex:W4408441342)  
**Source**: https://4ort.xyz/entity/a-digital-twin-framework-with-bayesian-optimization-and-deep-learning-for-semiconductor-process-control