# A Defect Detection Method Based on Improved Mask R-CNN for Wafer Maps

> Research article (2021 International Conference on Computer Network, Electronic and Automation (ICCNEA), 2021) · cited 15× · AI/ML

**Wikidata**: [openalex:W3216004607](https://www.wikidata.org/wiki/openalex:W3216004607)  
**Source**: https://4ort.xyz/entity/a-defect-detection-method-based-on-improved-mask-r-cnn-for-wafer-maps