# A deep residual neural network for semiconductor defect classification in imbalanced scanning electron microscope datasets

> Research article (Applied Soft Computing, 2022) · cited 14× · AI/ML

**Wikidata**: [openalex:W4307571293](https://www.wikidata.org/wiki/openalex:W4307571293)  
**Source**: https://4ort.xyz/entity/a-deep-residual-neural-network-for-semiconductor-defect-classification-in-imbalanced-scanning-electron-microscope-datase