# A Deep Learning Model for Identification of Defect Patterns in Semiconductor Wafer Map

> Research article (2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2019) · cited 60× · AI/ML

**Wikidata**: [openalex:W2968153557](https://www.wikidata.org/wiki/openalex:W2968153557)  
**Source**: https://4ort.xyz/entity/a-deep-learning-model-for-identification-of-defect-patterns-in-semiconductor-wafer-map