# A Deep Convolutional Autoencoder-Based Approach for Anomaly Detection With Industrial, Non-Images, 2-Dimensional Data: A Semiconductor Manufacturing Case Study

> Research article (IEEE Transactions on Automation Science and Engineering, 2022) · cited 49× · AI/ML

**Wikidata**: [openalex:W4205620295](https://www.wikidata.org/wiki/openalex:W4205620295)  
**Source**: https://4ort.xyz/entity/a-deep-convolutional-autoencoder-based-approach-for-anomaly-detection-with-industrial-non-images-2-dimensional-data-a-se