# A Data-Driven Variable-Gain Control Strategy for an Ultra-Precision Wafer Stage With Accelerated Iterative Parameter Tuning

> Research article (IEEE Transactions on Industrial Informatics, 2015) · cited 55× · AI/ML

**Wikidata**: [openalex:W1662965174](https://www.wikidata.org/wiki/openalex:W1662965174)  
**Source**: https://4ort.xyz/entity/a-data-driven-variable-gain-control-strategy-for-an-ultra-precision-wafer-stage-with-accelerated-iterative-parameter-tun