# A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries

> Research article (Computers & Industrial Engineering, 2015) · cited 38× · AI/ML

**Wikidata**: [openalex:W2095278535](https://www.wikidata.org/wiki/openalex:W2095278535)  
**Source**: https://4ort.xyz/entity/a-data-driven-two-stage-maintenance-framework-for-degradation-prediction-in-semiconductor-manufacturing-industries