# A Data Driven Cycle Time Prediction With Feature Selection in a Semiconductor Wafer Fabrication System

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2018) · cited 91× · AI/ML

**Wikidata**: [openalex:W2781476508](https://www.wikidata.org/wiki/openalex:W2781476508)  
**Source**: https://4ort.xyz/entity/a-data-driven-cycle-time-prediction-with-feature-selection-in-a-semiconductor-wafer-fabrication-system