# A Damped Decoupled <i>XY</i> Nanopositioning Stage Embedding Graded Local Resonators

> Research article (IEEE/ASME Transactions on Mechatronics, 2021) · cited 17× · AI/ML

**Wikidata**: [openalex:W3134962921](https://www.wikidata.org/wiki/openalex:W3134962921)  
**Source**: https://4ort.xyz/entity/a-damped-decoupled-i-xy-i-nanopositioning-stage-embedding-graded-local-resonators