# A Copula network deconvolution-based direct correlation disentangling framework for explainable fault detection in semiconductor wafer fabrication

> Research article (Advanced Engineering Informatics, 2023) · cited 16× · AI/ML

**Wikidata**: [openalex:W4388795502](https://www.wikidata.org/wiki/openalex:W4388795502)  
**Source**: https://4ort.xyz/entity/a-copula-network-deconvolution-based-direct-correlation-disentangling-framework-for-explainable-fault-detection-in-semic