# A Convolutional Neural Network for Fault Classification and Diagnosis in Semiconductor Manufacturing Processes

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2017) · cited 471× · AI/ML

**Wikidata**: [openalex:W2594332903](https://www.wikidata.org/wiki/openalex:W2594332903)  
**Source**: https://4ort.xyz/entity/a-convolutional-neural-network-for-fault-classification-and-diagnosis-in-semiconductor-manufacturing-processes