# A conceptual model to enable prescriptive maintenance for etching equipment in semiconductor manufacturing

> Research article (Procedia CIRP, 2020) · cited 30× · AI/ML

**Wikidata**: [openalex:W3035102738](https://www.wikidata.org/wiki/openalex:W3035102738)  
**Source**: https://4ort.xyz/entity/a-conceptual-model-to-enable-prescriptive-maintenance-for-etching-equipment-in-semiconductor-manufacturing