# A Computer Vision-Inspired Deep Learning Architecture for Virtual Metrology Modeling With 2-Dimensional Data

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2018) · cited 62× · AI/ML

**Wikidata**: [openalex:W2808993481](https://www.wikidata.org/wiki/openalex:W2808993481)  
**Source**: https://4ort.xyz/entity/a-computer-vision-inspired-deep-learning-architecture-for-virtual-metrology-modeling-with-2-dimensional-data