# A Comprehensive Big-Data-Based Monitoring System for Yield Enhancement in Semiconductor Manufacturing

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2017) · cited 77× · AI/ML

**Wikidata**: [openalex:W2620931432](https://www.wikidata.org/wiki/openalex:W2620931432)  
**Source**: https://4ort.xyz/entity/a-comprehensive-big-data-based-monitoring-system-for-yield-enhancement-in-semiconductor-manufacturing