# A complete methodology towards accuracy and lot-to-lot robustness in on-product overlay metrology using flexible wavelength selection

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2017) · cited 12× · AI/ML

**Wikidata**: [openalex:W2601315129](https://www.wikidata.org/wiki/openalex:W2601315129)  
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