# A Compact Fourier Transform Spectrometer on a Silicon Optical Bench With an Electrothermal MEMS Mirror

> Research article (Journal of Microelectromechanical Systems, 2016) · cited 38× · AI/ML

**Wikidata**: [openalex:W2329156745](https://www.wikidata.org/wiki/openalex:W2329156745)  
**Source**: https://4ort.xyz/entity/a-compact-fourier-transform-spectrometer-on-a-silicon-optical-bench-with-an-electrothermal-mems-mirror
