# A combination of library search and Levenberg-Marquardt algorithm in optical scatterometry

> Research article (Thin Solid Films, 2023) · cited 14× · AI/ML

**Wikidata**: [openalex:W4313499685](https://www.wikidata.org/wiki/openalex:W4313499685)  
**Source**: https://4ort.xyz/entity/a-combination-of-library-search-and-levenberg-marquardt-algorithm-in-optical-scatterometry